3D reconstruction for a scanning electron microscope

被引:6
|
作者
Zolotukhin A.A. [1 ]
Safonov I.V. [1 ]
Kryzhanovskii K.A. [1 ]
机构
[1] National Research Nuclear University MEPhi, Kashirskoe shosse 31, Moscow
关键词
micro-object; REM; shape reconstruction; stereo construction; stereo pair;
D O I
10.1134/S105466181301015X
中图分类号
学科分类号
摘要
An algorithm for the reconstruction of the 3D shape of the surface of a micro-object from a stereo pair of images obtained on a raster electron microscope (REM) has been considered. A model of building an image in REM has been presented. The SIFT algorithm was used for determination of the correspondence points. The correspondence points are used to determine the mutual position of the object in a stereo pair by the RANSAC method. A set of points is created in the 3D space, which is later interpolated to reconstruct the 3D surface. © 2013 Pleiades Publishing, Ltd.
引用
收藏
页码:168 / 174
页数:6
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