Features of high-power ion beam irradiation of nanoporous Si and SiO2

被引：0
|
作者：
V. S. Kovivchak
R. B. Burlakov
N. A. Davletkil’deev
机构：
[1] Russian Academy of Sciences,Omsk Branch, Institute of Semiconductor Physics, Siberian Branch
[2] Omsk State University,undefined
来源：
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques | 2010年 / 4卷
关键词：
Atomic Force Microscopy Image; Porous Silicon; Porous Layer; Neutron Technique; Porous Silicon Layer;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Nanoporous Si and SiO2 melting observed under high-power ion beam irradiation of nanosecond duration was investigated. The sizes of ellipsoidal particles formed in Si and those of holes formed in SiO2 under irradiation were determined. The possible origin of these morphology features was discussed.
引用
收藏
页码：245 / 247
页数：2
相关论文
共 50 条
  • [31] Ion-beam synthesis of InSb nanocrystals at the Si/SiO2 interface
    Tyschenko, Ida
    Zhang, Ruonan
    Volodin, Vladimir
    Popov, Vladimir
    MATERIALS LETTERS, 2022, 306
  • [32] Buried SiO2 layer formation in Si with an MeV O ion beam
    Ellingboe, S.
    Ridgway, M.C.
    Schultz, P.J.
    Journal of Applied Physics, 1993, 73 (03):
  • [33] ION-BEAM-ENHANCED ADHESION OF AU FILMS ON SI AND SIO2
    BERKOWITZ, AE
    BENENSON, RE
    FLEISCHER, RL
    WIELUNSKI, L
    LANFORD, WA
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR): : 877 - 880
  • [34] REACTIVE AND CHEMICALLY ASSISTED ION-BEAM ETCHING OF SI AND SIO2
    CARTER, MA
    GOLDSPINK, GF
    VACUUM, 1988, 38 (01) : 5 - 10
  • [35] Photoluminescences from Si nanocrystals in ion-beam-mixed Si/SiO2 layers
    Chae, KH
    Son, JB
    Kim, HB
    Im, S
    Lyo, IW
    Whang, CN
    JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2000, 36 (03) : 169 - 172
  • [36] SILICON PRECIPITATION IN A SURFACE-LAYER OF SIO2 BY HIGH-POWER VACUUM ULTRAVIOLET-LASER IRRADIATION
    KUROSAWA, K
    TAKIGAWA, Y
    SASAKI, W
    OKUDA, M
    INOUE, Y
    SURFACE SCIENCE, 1991, 242 (1-3) : 475 - 480
  • [37] ETCHING OF SIO2 IN A NARROWLY CONFINED PLASMA OF HIGH-POWER DENSITY
    EISELE, KM
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1986, 4 (05): : 1227 - 1232
  • [38] Features of the morphology, defect substructure, and phase composition of metal and alloy surfaces upon high-power ion beam irradiation
    Korotaev, AD
    Tyumentsev, AN
    Pinzhin, YP
    Remnev, GE
    SURFACE & COATINGS TECHNOLOGY, 2004, 185 (01): : 38 - 49
  • [39] Specific features of high-power nanosecond ion beam action on polycrystalline bismuth
    V. S. Kovivchak
    T. V. Panova
    K. A. Mikhailov
    Technical Physics Letters, 2012, 38 : 77 - 79
  • [40] Features of the Effect of a High-Power Ion Beam of Nanosecond Duration on Polyethylene Terephthalate
    V. S. Kovivchak
    Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques, 2023, 17 : 328 - 331
12345