Microstructure and Density of Mo Films in Multilayer Mo/Si Mirrors

被引：0
|
作者：
Yu. A. Vainer
S. A. Garakhin
V. N. Polkovnikov
N. N. Salashchenko
M. V. Svechnikov
N. I. Chkhalo
P. A. Yunin
机构：
[1] Institute for Physics of Microstructures,
[2] Russian Academy of Sciences,undefined
来源：
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques | 2019年 / 13卷
关键词：
X-ray multilayer mirror; X-ray diffraction; thin film density; coherent-scattering region; Williamson–Hall plot; aperiodic mirror;
D O I：
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中图分类号：
学科分类号：
摘要：
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页码：8 / 13
页数：5
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