Design of a packaging-friendly double-topology RF MEMS switch for space applications

被引：0
|
作者：
Evgeny A. Savin
Roman V. Kirtaev
Andrey A. Zhukov
Pavel I. Didyk
机构：
[1] Bazovye Tekhnologii,
[2] LLC,undefined
[3] Moscow Institute of Physics and Technology,undefined
[4] Russian Space Systems,undefined
[5] JSC,undefined
来源：
Microsystem Technologies | 2019年 / 25卷
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学科分类号：
摘要：
This article presents the results of the research, design and a series of manufacturing steps of an RF-MEMS switch to be used in space communication systems. Design and measurement results are discussed. Double-topology geometry for anodic bonding is presented.
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页码：51 / 55
页数：4
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