Estimates Related to the Error Self-Compensation Mechanism in Optical Coatings Deposition

被引:0
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作者
A. V. Tikhonravov
I. V. Kochikov
I. A. Matvienko
S. A. Sharapova
A. G. Yagola
机构
[1] Research Computer Center,
[2] Moscow State University,undefined
[3] Department of Physics,undefined
[4] Moscow State University,undefined
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thin films; optical coatings; optical monitoring;
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页码:627 / 631
页数:4
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