Estimates Related to the Error Self-Compensation Mechanism in Optical Coatings Deposition

被引：0
|
作者：
A. V. Tikhonravov
I. V. Kochikov
I. A. Matvienko
S. A. Sharapova
A. G. Yagola
机构：
[1] Research Computer Center,
[2] Moscow State University,undefined
[3] Department of Physics,undefined
[4] Moscow State University,undefined
来源：
Moscow University Physics Bulletin | 2018年 / 73卷
关键词：
thin films; optical coatings; optical monitoring;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
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页码：627 / 631
页数：4
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