Quantitative analysis of ITO film by laser-induced breakdown spectroscopy

Laser-induced breakdown spectroscopy (LIBS) is an effective method for nondestructive rapid element analysis in a wide range of media in situ. We use the LIBS technique for quantitative analysis of indium tin oxide (ITO) films, which are transparent conducting materials widely used in industry. The plasma is generated by focusing a Nd:YAG laser pulse with a duration of 10 ns and a wavelength of 1064 nm onto the ITO-sample surface. We perform test experiments to define optimum values of the laser-pulse energy and the time delay between the laser pulse and the beginning of the LIBS spectra acquisition. Next, by the calibration-free Boltzmann plot method, we assess the plasma temperature and finally calculate the content of In and Sn in the test ITO specimen, and this agrees well with real concentration values.