Fabrication of nanostructures with different iron concentration by electron beam induced deposition with a mixture gas of iron carbonyl and ferrocene, and their magnetic properties

被引：0
|
作者：
M. Takeguchi
M. Shimojo
K. Mitsuishi
M. Tanaka
R. Che
K. Furuya
机构：
[1] National Institute for Materials Science,High Voltage Electron Microscopy Station
[2] Saitama Institute of Technology,Advanced Science Research Laboratory
来源：
Journal of Materials Science | 2006年 / 41卷
关键词：
Iron Concentration; Ferrocene; Iron Carbonyl; Phase Jump; Stray Field;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Electron beam induced deposition (EBID) with a mixture gas of iron carbonyl and ferrocene was carried out to fabricate nanostructures with different iron concentrations in a chamber of a scanning electron microscope. The iron concentration was controlled by changing the ratio of partial pressure of iron carbonyl and ferrocene. Electron holography observation revealed that the remanent magnetic flux density Br values of the nanostructures were also changed depending on the iron concentration.
引用
收藏
页码：4532 / 4536
页数：4
相关论文
共 50 条
  • [21] Focused electron beam-induced deposition of iron- and carbon-containing nanostructures from triiron dodecacarbonyl vapor
    Bruk, MA
    Zhikharev, EN
    Grigor'ev, EI
    Spirin, AV
    Kal'nov, VA
    Kardash, IE
    HIGH ENERGY CHEMISTRY, 2005, 39 (02) : 65 - 68
  • [22] Focused electron beam-induced deposition of iron- and carbon-containing nanostructures from triiron dodecacarbonyl vapor
    M. A. Bruk
    E. N. Zhikharev
    E. I. Grigor’ev
    A. V. Spirin
    V. A. Kal’nov
    I. E. Kardash
    High Energy Chemistry, 2005, 39 : 65 - 68
  • [23] Fabrication and properties of dot array using electron-beam-induced deposition
    Komuro, M
    Hiroshima, H
    MICROELECTRONIC ENGINEERING, 1997, 35 (1-4) : 273 - 276
  • [24] Fabrication and properties of dot array using electron-beam-induced deposition
    Komuro, M.
    Hiroshima, H.
    Denshi Gijutsu Sogo Kenkyusho Iho/Bulletin of the Electrotechnical Laboratory, 1997, 61 (04):
  • [25] Fabrication and electrical transport properties of binary Co-Si nanostructures prepared by focused electron beam-induced deposition
    Porrati, F.
    Kaempken, B.
    Terfort, A.
    Huth, M.
    JOURNAL OF APPLIED PHYSICS, 2013, 113 (05)
  • [26] Manipulating the switching in modulated iron nanowires grown by focused electron beam induced deposition
    Cordoba, R.
    Han, D. -S.
    Koopmans, B.
    MICROELECTRONIC ENGINEERING, 2016, 153 : 60 - 65
  • [27] Generation mechanism and in situ growth behavior of α-iron nanocrystals by electron beam induced deposition
    Zhang, Wei
    Shimojo, Masayuki
    Takeguchi, Masaki
    Che, Ren-chao
    Furuya, Kazuo
    ADVANCED ENGINEERING MATERIALS, 2006, 8 (08) : 711 - 714
  • [28] Top-down meets bottom-up - Electron-beam induced metalorganic deposition of amorphous iron oxide nanostructures
    Trudel, Simon
    Hill, Ross H.
    CANADIAN JOURNAL OF CHEMISTRY, 2009, 87 (01) : 217 - 223
  • [29] Fabrication of narrow-gap nanostructures using electron-beam induced deposition etch masks
    Weppelman, I. G. C.
    Post, P. C.
    Heerkens, C. T. H.
    Hagen, C. W.
    Hoogenboom, J. P.
    MICROELECTRONIC ENGINEERING, 2016, 153 : 77 - 82
  • [30] Fabrication of pure gold nanostructures by electron beam induced deposition with Au(CO)Cl precursor: deposition characteristics and primary beam scattering effects
    Mulders, J. J. L.
    Veerhoek, J. M.
    Bosch, E. G. T.
    Trompenaars, P. H. F.
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2012, 45 (47)
12345