Fabrication of nanostructures with different iron concentration by electron beam induced deposition with a mixture gas of iron carbonyl and ferrocene, and their magnetic properties

被引:0
|
作者
M. Takeguchi
M. Shimojo
K. Mitsuishi
M. Tanaka
R. Che
K. Furuya
机构
[1] National Institute for Materials Science,High Voltage Electron Microscopy Station
[2] Saitama Institute of Technology,Advanced Science Research Laboratory
来源
关键词
Iron Concentration; Ferrocene; Iron Carbonyl; Phase Jump; Stray Field;
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学科分类号
摘要
Electron beam induced deposition (EBID) with a mixture gas of iron carbonyl and ferrocene was carried out to fabricate nanostructures with different iron concentrations in a chamber of a scanning electron microscope. The iron concentration was controlled by changing the ratio of partial pressure of iron carbonyl and ferrocene. Electron holography observation revealed that the remanent magnetic flux density Br values of the nanostructures were also changed depending on the iron concentration.
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页码:4532 / 4536
页数:4
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