Gas-sensitive properties of thin nickel oxide films

The results of a study of the gas-sensitive properties of nickel oxide layers with respect to n-hexane, acetone, ethanol, benzene, o-xylene, toluene and ammonia are presented. NiO layers 100 ± 5 nm thick were obtained by chemical vapor deposition in the systems (EtCp)2Ni–О2–Ar and (EtCp)2Ni–О3–О2–Ar. The electrical resistance of the layers changes in the presence of hexane, ethanol, benzene, and ammonia vapors. The electrical resistance of the obtained layers changed in the presence of vapors of hexane, ethanol, benzene and ammonia. Response and recovery time of the sensing element of the gas sensors did not exceed 6 s in the temperature range 500–600 K.