Modelling and Experiment of a Silicon Resonant Pressure Sensor

被引：0
|
作者：
Zheng Cui
Deyong Chen
Shanhong Xia
机构：
[1] Rutherford Appleton Laboratory,The State Key Laboratory of Transducer Technology, Institute of Electronics
[2] Chinese Academy of Sciences,undefined
来源：
Analog Integrated Circuits and Signal Processing | 2002年 / 32卷
关键词：
MEMS design; silicon resonator; pressure sensor; computer simulation;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Modelling of a silicon resonator as a pressure sensor is presented. The resonator is electrothermally excited and the resonance frequency shift is detected by a piezoresistive thin film detector. Computer simulation using the commercial MEMS software tool IntelliSuite™ is compared with analytical model. Various design aspects, such as the pressure sensitivity, electrothermal heating of vibrating beam, influence of detection current and damping effect are investigated. Silicon resonator sensors have been fabricated and measured. The characteristics predicted by computer simulation has been confirmed by experimental results.
引用
收藏
页码：29 / 35
页数：6
相关论文
共 50 条
  • [1] Modelling and experiment of a silicon resonant pressure sensor
    Cui, Z
    Chen, DY
    Xia, SH
    ANALOG INTEGRATED CIRCUITS AND SIGNAL PROCESSING, 2002, 32 (01) : 29 - 35
  • [2] Design and modelling of a silicon resonant pressure sensor
    Cui, Z
    Chen, DY
    Xia, SH
    DESIGN,TEST INTEGRATION, AND PACKAGING OF MEMS/MOEMS 2001, 2001, 4408 : 187 - 193
  • [3] MINIATURE SILICON RESONANT PRESSURE SENSOR
    GREENWOOD, JC
    SATCHELL, DW
    IEE PROCEEDINGS-D CONTROL THEORY AND APPLICATIONS, 1988, 135 (05): : 369 - 372
  • [4] A silicon micromachined resonant pressure sensor
    Tang, Zhangyang
    Fan, Shangchun
    Cai, Chenguang
    8TH CHINA INTERNATIONAL NANOSCIENCE AND TECHNOLOGY SYMPOSIUM (CINSTS09), 2009, 188
  • [5] Design and modelling of a micro resonant pressure sensor
    Y. Sujan
    G. Uma
    M. Umapathy
    Microsystem Technologies, 2017, 23 : 1285 - 1293
  • [6] Design and modelling of a micro resonant pressure sensor
    Sujan, Y.
    Uma, G.
    Umapathy, M.
    MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2017, 23 (05): : 1285 - 1293
  • [7] Silicon Resonant Micro Pressure Sensor and Micro Resonant Accelerometer
    Shi, Xin
    Guan, Zhengzheng
    Wu, Hua
    ADVANCES IN CHEMICAL ENGINEERING II, PTS 1-4, 2012, 550-553 : 3376 - +
  • [8] Temperature compensation of silicon resonant pressure sensor
    Veris, J
    SENSORS AND ACTUATORS A-PHYSICAL, 1996, 57 (03) : 179 - 182
  • [9] A Resonant Differential Pressure Sensor Based on Bulk Silicon Technology
    Cheng, Chao
    Li, Yadong
    Lu, Yulan
    Xiang, Chao
    Chen, Jian
    Wang, Junbo
    Chen, Deyong
    2021 IEEE 16TH INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (NEMS), 2021, : 193 - 196
  • [10] A BALANCED DUAL-DIAPHRAGM RESONANT PRESSURE SENSOR IN SILICON
    STEMME, E
    STEMME, G
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 1990, 37 (03) : 648 - 653
12345