Observations of IMC Formation for Au Wire Bonds to Al Pads

被引:0
|
作者
John DeLucca
John Osenbach
Frank Baiocchi
机构
[1] LSI Corporation,
[2] Texas Instruments Inc.,undefined
来源
关键词
Wire bond; Au-Al; TEM; intermetallic; microstructure; phase; aging;
D O I
暂无
中图分类号
学科分类号
摘要
A materials investigation of Au wire bonds to Al pads revealed the evolution of a multiphase system whose terminal phases depended on the composition of the Au wire. Scanning transmission electron microscopy/energy-dispersive spectroscopy and electron diffraction data are presented for Au/Al wire bonds using both Pd-doped, 99% pure Au wire (2N) and 99.99% pure Au wire (4N) in the as-formed state, upon completion of overmold operations, and after reflow and aging. The reacted interfaces of both the 2N and 4N bonds were found to take on a bilayer intermetallic compound (IMC) microstructure that persisted with aging and phase changes; it is the interface of this bilayer that is believed to be susceptible to mechanical degradation. Pd was found to accumulate in the IMC near the Au/IMC interface for 2N wire bonds and appears to lead to a phase evolution different from that for 4N wire that may be responsible for enhanced reliability of the 2N wire bond with high-temperature aging.
引用
收藏
页码:748 / 756
页数:8
相关论文
共 50 条
  • [31] Effect of plasma treatment of Au-Ni-Cu bond pads on process window's of Au wire bonding
    Chan, YH
    Kim, JK
    Liu, DM
    Liu, PCK
    Cheung, YM
    Ng, MW
    IEEE TRANSACTIONS ON ADVANCED PACKAGING, 2005, 28 (04): : 674 - 684
  • [32] Optical observations of plasma formation and wire core expansion of Au, Ag, and Cu wires with 0-1 kA per wire
    Hu, M
    Kusse, BR
    PHYSICS OF PLASMAS, 2004, 11 (03) : 1145 - 1150
  • [33] Research on prevention of corrosion at Au-Al bonds
    Shoji, T
    Miyamoto, K
    Shimizu, I
    Ohno, Y
    2001 INTERNATIONAL SYMPOSIUM ON MICROELECTRONICS, PROCEEDINGS, 2001, 4587 : 492 - 496
  • [34] Corrosion of intermetallic layer and reliability of Au Al bonds
    Uno, T
    Tatsumi, K
    JOURNAL OF THE JAPAN INSTITUTE OF METALS, 1999, 63 (03) : 406 - 415
  • [35] Influence of ambient gas on ultrasonic ball bondability of Au wire onto Au, Cu and Al pads - study of ultrasonic bonding with surface cleaning by ion bombardment (Report 3)
    Kajiwara, Ryoichi
    Takahashi, Toshiyuki
    Tsubosaki, Kunihiro
    Watanabe, Hiroshi
    Yosetsu Gakkai Ronbunshu/Quarterly Journal of the Japan Welding Society, 1999, 17 (01): : 139 - 147
  • [36] RELIABLE AU WIRE BONDING TO AL-TI-AL PAD
    UENO, H
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1993, 32 (5A): : 2157 - 2161
  • [37] Oxidation and Corrosion of Au/Al and Cu/Al in Wire bonding Assembly
    Lee, Teck Kheng
    Breach, C. D.
    Chong, Wee Ling
    Goh, Chwee Sim
    2012 13TH INTERNATIONAL CONFERENCE ON ELECTRONIC PACKAGING TECHNOLOGY & HIGH DENSITY PACKAGING (ICEPT-HDP 2012), 2012, : 244 - 249
  • [38] INFLUENCE OF AL FILM THICKNESS ON BONDABILITY OF AU WIRE TO AL PAD
    UENO, H
    MATERIALS TRANSACTIONS JIM, 1992, 33 (11): : 1046 - 1050
  • [39] Effects of Cu/Al intermetallic compound (IMC) on copper wire and aluminum pad bondability
    Kim, HJ
    Lee, JY
    Paik, KW
    Koh, KW
    Won, JH
    Choi, SH
    Lee, J
    Moon, JT
    Park, YJ
    ADVANCES IN ELECTRONIC MATERIALS AND PACKAGING 2001, 2001, : 44 - 51
  • [40] Interconnection of Cu wire/Au plating pads using parallel gap resistance microwelding process
    Liu, Yang
    Tian, Yanhong
    Liu, Baolei
    Xu, Jikai
    Feng, Jiayun
    Wang, Chenxi
    2016 17TH INTERNATIONAL CONFERENCE ON ELECTRONIC PACKAGING TECHNOLOGY (ICEPT), 2016, : 43 - 46