Solid-phase reactions in Ir/(111)Si systems studied by means of x-ray emission spectroscopy

被引：0
|
作者：
E. Z. Kurmaev
V. R. Galakhov
S. N. Shamin
T. Rodríguez
A. Almendra
J. Sanz-Maudes
K. Göransson
I. Engström
机构：
[1] Institute of Metal Physics,Russian Academy of Science–Ural Division
[2] Institute of Chemistry,undefined
[3] University of Uppsala,undefined
来源：
Journal of Materials Research | 1998年 / 13卷
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摘要：
High energy resolved x-ray emission spectroscopy with variable electron beam excitation is applied for study of solid-phase reactions in the Ir/(111)Si system as a function of annealing temperature. The formation of Ir silicides as a function of depth is studied by measurements of Si L2,3 x-ray emission valence spectra at different electron excitation energies (3–10 keV), and the results are compared with those of Rutherford backscattering.
引用
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页码：1950 / 1955
页数：5
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