Field-effect transistor based on ZnO nanorods with a variable threshold cutoff voltage

被引:0
|
作者
A. N. Gruzintsev
A. N. Redkin
C. Opoku
M. N. Shkunov
机构
[1] Russian Academy of Sciences,Institute of Microelectronics Technology Problems
[2] University of Surrey,Advanced Technology Institute
来源
Semiconductors | 2013年 / 47卷
关键词
Zinc Oxide; Threshold Voltage; Gate Voltage; Field Effect Transistor; Drain Current;
D O I
暂无
中图分类号
学科分类号
摘要
This study is concerned with the fabrication and electrical characteristics of short-channel (2 μm) field-effect transistors (FETs) based on ZnO nanorods. In FET fabrication, single-crystal ZnO nanorods are grown using the catalyst-free chemical vapor deposition (CVD) method. Although the short-channel ZnO-nanorod FETs exhibit good electrical characteristics (a transconductance of 100 nS, electron mobility of 6 cm2 V−1 s−1, and a large turn-ON/OFF ratio of 104), their characteristics significantly depend on the length of the nanorods. The effect of the drain-source voltage on the threshold gate voltage is studied.
引用
收藏
页码:538 / 542
页数:4
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