Laser micromachining of porous anodic alumina film

被引：0
|
作者：
H. Jha
T. Kikuchi
M. Sakairi
H. Takahashi
机构：
[1] Hokkaido University,Lab. of Interface Microstructure Analysis (LIMSA), Division of Materials Science and Engineering, Graduate School of Engineering
来源：
Applied Physics A | 2007年 / 88卷
关键词：
Scanning Speed; Anodic Alumina; Aluminum Substrate; Oxalic Acid Solution; Porous Anodic Alumina;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
A laser direct-write process on porous anodic alumina film is carried out for the fabrication of microstructure on the film, using nanosecond, second harmonic Nd:YAG laser. Laser micromachining can be preformed in two different ways on colored and pore-sealed anodic alumina film, to generate microstructures on the film. Removal of the aluminum substrate before laser irradiation greatly improves the shape characteristics of the microstructure. The depth of microstructures can be controlled by the power and the scanning speed of the laser beam. Several structures with depths from 1 to 35 μm were fabricated on anodic alumina film with good precision and reproducibility.
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页码：617 / 622
页数：5
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