A Novel Compact Model for On-Chip Vertically-Coiled Spiral Inductors

被引:0
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作者
Bing Hou
Tong Liu
Jun Liu
Junli Chen
Faxin Yu
Wenbo Wang
机构
[1] Beijing University of Posts and Telecommunications,School of Information and Communication Engineering
[2] Zhejiang University,School of Aeronautics and Astronautics
[3] Hangzhou Dianzi University,Key Laboratory for RF Circuits and Systems of Ministry of Education
[4] Shanghai Jiao Tong University,School of Electronic Information and Electrical Engineering
来源
关键词
On-chip; Vertically coiled spiral inductor; Compact model;
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学科分类号
摘要
A novel compact model for on-chip vertically coiled spiral inductors is presented. The vertical metal coils are modeled by a ladder network consisting of ideal inductors and resistors. The skin and proximity effects are taken into consideration. The capacitive parasitics between relevant metal layers are modeled. A method to analytically extract the model parameters is proposed. The model prediction shows excellent agreement between the data from both simulation and measurement over the frequency range of 0.1–66.1 GHz, for a vertically coiled spiral inductor manufactured in TSMC 90 nm RF CMOS technology.
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页码:649 / 652
页数:3
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