Formation of field-emission emitters by microwave plasma-chemical synthesis of nanocarbon structures

被引：0

作者：

R. K. Yafarov

E. S. Gornev

S. N. Orlov

S. P. Timoshenkov

V. P. Timoshenkov

A. S. Timoshenkov

机构：

[1] Russian Academy of Sciences,Kotel’nikov Institute of Radio Engineering and Electronics, Saratov Branch

[2] Molecular Electronics Research Institute,undefined

[3] National Research University Moscow Institute of Electronic Technology (MIET),undefined

来源：

Semiconductors | 2016年 / 50卷

关键词：

diamond and graphite films; microwave deposition; field-emission devices;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

A nanocarbon-emitter technology for integrated field-emission elements has been developed. The modes in which various carbon film structures of diamond, graphite, and graphene-like types are produced were determined. The low-temperature method of obtaining ultradispersed diamonds was examined. It is shown that the high-emission properties of nanodiamond-graphite emitters result from the self-organization of diamond nanocrystals in a graphite film in the course of deposition from ethanol vapor at low pressure with the use of a strongly nonequilibrium microwave plasma. The following parameters of integrated field-emission diodes were obtained: emission threshold of 2.5 V/μm and emission current density of 1.75 A/cm2. The highest current density of more than 20 A/cm2 was obtained in a study of blade-type emitters.

引用

页码：1726 / 1728

页数：2

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