X-Ray fluorescence analysis of Ge–As–Se glasses using X-Ray and electron-beam excitation

The quantitative content of germanium, arsenic, and selenium in As1–xSex, Ge1–xSex, and Ge1–x–yAsySex (Asy(Ge1–zSez)1–y) glassy alloys has been determined by X-ray fluorescence analysis with fluorescence excitation by bremsstrahlung X-rays and an electron beam. The use of these techniques has made it possible to determine the quantitative composition of the glasses (x, y, and z) with an accuracy of ±0.0002 in a surface layer 0.1 mm (under X-ray excitation) to 0.1 μm (under electron beam excitation) in thickness.