Physicochemical Properties and Structure of SiCxNy:Fe Films Grown From a Gas Mixture of Ferrocene, Hydrogen and 1,1,3,3,5,5-Hexamethylcyclotrisilazane

被引：0
|
作者：
N. I. Fainer
R. V. Pushkarev
S. B. Ehrenburg
S. V. Trubina
V. A. Shestakov
I. S. Merenkov
M. Terauchi
机构：
[1] Russian Academy of Sciences,Nikolaev Institute of Inorganic Chemistry, Siberian Branch
[2] Tohoku University,IMRAM
来源：
Journal of Structural Chemistry | 2018年 / 59卷
关键词：
nanocomposite films; thermodynamic modeling; CVD; 1,1,3,3,5,5-hexamethylcyclotrisilazane; ferrocene; Raman; HRTEM and EXAFS spectroscopy;
D O I：
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学科分类号：
摘要：
Raman spectroscopy, high-resolution transmission electron microscopy (HRTEM), and EXAFS spectroscopy are used to study the composition and structure of SiCxNy:Fe films obtained by chemical vapor deposition (CVD) in the Fe–Si–C–N–H system from a mixture of hydrogen, ferrocene (C5H5)2Fe, and organosilicon compound 1,1,3,3,5,5–hexamethylcyclotrisilazane (HMCTS) C6H21N3Si3. The films are deposited under low pressures (LPCVD) at 1123–1273 K, and their phase composition at 300–1300 K is predicted using thermodynamic modeling. The obtained films are nanocomposites with amorphous matrices containing α-Fe crystallites and carbon clusters with a size of 5–10 nm.
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页码：1588 / 1595
页数：7
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