Physicochemical Properties and Structure of SiCxNy:Fe Films Grown From a Gas Mixture of Ferrocene, Hydrogen and 1,1,3,3,5,5-Hexamethylcyclotrisilazane

被引：0

作者：

N. I. Fainer

R. V. Pushkarev

S. B. Ehrenburg

S. V. Trubina

V. A. Shestakov

I. S. Merenkov

M. Terauchi

机构：

[1] Russian Academy of Sciences,Nikolaev Institute of Inorganic Chemistry, Siberian Branch

[2] Tohoku University,IMRAM

来源：

Journal of Structural Chemistry | 2018年 / 59卷

关键词：

nanocomposite films; thermodynamic modeling; CVD; 1,1,3,3,5,5-hexamethylcyclotrisilazane; ferrocene; Raman; HRTEM and EXAFS spectroscopy;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

Raman spectroscopy, high-resolution transmission electron microscopy (HRTEM), and EXAFS spectroscopy are used to study the composition and structure of SiCxNy:Fe films obtained by chemical vapor deposition (CVD) in the Fe–Si–C–N–H system from a mixture of hydrogen, ferrocene (C5H5)2Fe, and organosilicon compound 1,1,3,3,5,5–hexamethylcyclotrisilazane (HMCTS) C6H21N3Si3. The films are deposited under low pressures (LPCVD) at 1123–1273 K, and their phase composition at 300–1300 K is predicted using thermodynamic modeling. The obtained films are nanocomposites with amorphous matrices containing α-Fe crystallites and carbon clusters with a size of 5–10 nm.

引用

页码：1588 / 1595

页数：7

共 50 条

[1] Physicochemical Properties and Structure of SiCxNy:Fe Films Grown From a Gas Mixture of Ferrocene, Hydrogen and 1,1,3,3,5,5-Hexamethylcyclotrisilazane
Fainer, N. I.
Pushkarev, R. V.
Ehrenburg, S. B.
Trubina, S. V.
Shestakov, V. A.
Merenkov, I. S.
Terauchi, M.
JOURNAL OF STRUCTURAL CHEMISTRY, 2018, 59 (07) : 1588 - 1595
[2] Synthesis and characterization of silazane oligomer containing 1,1,3,3,5,5-hexamethylcyclotrisilazane
Xu, Cai-Hong
Zhou, Ning
Xie, Ze-Min
Chinese Journal of Polymer Science (English Edition), 2000, 18 (05): : 449 - 452
[3] DEPOSITION CHEMISTRY AND STRUCTURE OF PLASMA-DEPOSITED SILICON-NITRIDE FILMS FROM 1,1,3,3,5,5-HEXAMETHYLCYCLOTRISILAZANE
BROOKS, TA
HESS, DW
JOURNAL OF APPLIED PHYSICS, 1988, 64 (02) : 841 - 848
[4] Synthesis and characterization of silazane oligomer containing 1,1,3,3,5,5-hexamethylcyclotrisilazane
Xu, CH
Zhou, N
Xie, ZM
CHINESE JOURNAL OF POLYMER SCIENCE, 2000, 18 (05) : 449 - 452
[5] Synthesis of Highly Transparent SiCxNyOz:H Films via Plasma-Chemical Decomposition of 1,1,3,3,5,5-Hexamethylcyclotrisilazane, Oxygen, and Nitrogen Gas Mixture
A. G. Plekhanov
N. I. Fainer
E. A. Maksimovskiy
V. R. Shayapov
I. V. Yushina
M. N. Khomyakov
Russian Journal of General Chemistry, 2019, 89 : 2290 - 2294
[6] Characterization of silicon nitride and silicon carbonitride layers from 1,1,3,3,5,5-hexamethylcyclotrisilazane plasmas
Brooks, T.A.
Hess, D.W.
Journal of the Electrochemical Society, 1988, 135 (12): : 3086 - 3093
[7] Synthesis of Highly Transparent SiCxNyOz:H Films via Plasma-Chemical Decomposition of 1,1,3,3,5,5-Hexamethylcyclotrisilazane, Oxygen, and Nitrogen Gas Mixture
Plekhanov, A. G.
Fainer, N. I.
Maksimovskiy, E. A.
Shayapov, V. R.
Yushina, I. V.
Khomyakov, M. N.
RUSSIAN JOURNAL OF GENERAL CHEMISTRY, 2019, 89 (11) : 2290 - 2294
[8] CHARACTERIZATION OF SILICON-NITRIDE AND SILICON CARBONITRIDE LAYERS FROM 1,1,3,3,5,5-HEXAMETHYLCYCLOTRISILAZANE PLASMAS
BROOKS, TA
HESS, DW
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1988, 135 (12) : 3086 - 3093
[9] PLASMA-ENHANCED CHEMICAL VAPOR-DEPOSITION OF SILICON-NITRIDE FROM 1,1,3,3,5,5-HEXAMETHYLCYCLOTRISILAZANE AND AMMONIA
BROOKS, TA
HESS, DW
THIN SOLID FILMS, 1987, 153 : 521 - 529
[10] Composition, structure, and magnetic properties of SiCxNyFez films produced by the PECVD method from a gas mixture of 1,1,1,3,3,3-hexam- ethyldisilazane, ferrocene, and helium
Plekhanov, A. G.
Maksimovskiy, E. A.
Kriventsov, V. V.
Korolkov, I. V.
Saraev, A. A.
Lavrov, A. N.
Grebenkina, M. A.
Kolodin, A. N.
Trunova, V. A.
COLLOIDS AND SURFACES A-PHYSICOCHEMICAL AND ENGINEERING ASPECTS, 2022, 655

← 1 2 3 4 5 →