Synthesis and optical properties of silicon nanowires grown by different methods

被引:0
|
作者
A. Colli
S. Hofmann
A. Fasoli
A.C. Ferrari
C. Ducati
R.E. Dunin-Borkowski
J. Robertson
机构
[1] University of Cambridge,Department of Engineering
[2] University of Cambridge,Department of Materials Science and Metallurgy
来源
Applied Physics A | 2006年 / 85卷
关键词
Chemical Vapour Deposition; Vapour Transport; Electron Energy Loss Spectroscopy; Silicon Nanowires; Chemical Vapour Deposition Growth;
D O I
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中图分类号
学科分类号
摘要
We review our recent results on the growth and characterization of silicon nanowires (SiNWs). Vapour-phase deposition techniques are considered, including chemical vapour deposition (CVD), plasma-enhanced chemical vapour deposition (PECVD), high-temperature annealing, and thermal evaporation. We present complementary approaches to SiNW production. We investigate the low-temperature (down to 300 °C) selective nucleation of SiNWs by Au-catalysed CVD and PECVD. Bulk production of SiNWs is obtained by thermal-vapour deposition from Si/SiO powders in a high-temperature furnace. In this case, SiNWs grow either by condensing on Au catalyst films, or by self-condensation of the vapour in a lower-temperature region of the furnace. Finally, we also achieve controlled growth by thermolysis of nanopatterned, multi-layered Si/Au thin-film precursors. The as-produced wires are compared in terms of yield, structural quality, and optical properties. Raman and photoluminescence spectra of SiNWs are discussed.
引用
收藏
页码:247 / 253
页数:6
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