Fabrication of InP-based monolithically integrated laser transmitters

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作者
Song Liang
Dan Lu
Lingjuan Zhao
Hongliang Zhu
Baojun Wang
Daibing Zhou
Wei Wang
机构
[1] Chinese Academy of Sciences,Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors
[2] University of Chinese Academy of Sciences,College of Materials Science and Opto
[3] Chinese Academy of Sciences,Electronic Technology
来源
关键词
photonic integration; EMLs; multi-wavelength DFB laser arrays; widely tunable DBR lasers; integrated AFL; few-mode transmitters;
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摘要
InP-based photonic integrated circuits (PICs) have aroused great interest in recent years to meet the needs of future high-capacity and high-performance optical systems. With the advantages of small size, low power consumption, low cost, high reliability, InP-based PICs are promising solutions to replace the multiple discrete devices used in various systems. In this paper, we will review the design, fabrication, key integration technology and performance of several kinds of InP-based monolithically integrated transmitters developed in our group in recent years. Particular attention will be paid to the electro-absorption modulated laser (EML), multi-wavelength distributed feedback (DFB) laser arrays, widely tunable distributed reflector (DBR) lasers and their arrays, integrated amplified feedback lasers (AFL), and few-mode transmitters.
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