Fabrication of Ternary Phase Composition-Spread Thin Film Libraries and Their High-Throughput Characterization: Ti1−x−yZrxHfyO2 for Bandgap Engineering

被引：0
|
作者：
Y. Yamada
T. Fukumura
M. Ikeda
M. Ohtani
H. Toyosaki
A. Ohtomo
F. Matsukura
H. Ohno
M. Kawasaki
机构：
[1] Tohoku University,Institute for Materials Research
[2] Japan Science and Technology Agency,Research Institute of Electrical Communication
[3] Tohoku University,Combinatorial Materials Exploration and Technology
[4] National Institute for Materials Science,undefined
来源：
Journal of Superconductivity | 2005年 / 18卷
关键词：
combinatorial library; oxide semiconductor; TiO; ferromagnetic semiconductor; wide gap;
D O I：
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学科分类号：
摘要：
Ternary phase composition-spread thin film libraries, TiO2-ZrO2-HfO2, were synthesized by using a combinatorial pulsed laser deposition system. The composition, crystalline structure, and optical transmission properties were characterized in a high-throughput way. TiO2 doped with Zr and Hf was found to exhibit a wider bandgap than pure TiO2; hence, these compounds can be used as wide gap semiconductors for heteroepitaxial spintronics devices, based on a ferromagnetic semiconductor, Co-doped TiO2.
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页码：109 / 113
页数：4
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