Investigation of Si and O Donor Impurities in Unintentionally Doped MBE-Grown GaN on SiC(0001) Substrate

We have investigated the unintentional n-type background doping in GaN(0001) layers grown on semi-insulating 4H-SiC(0001) substrate by plasma-assisted molecular beam epitaxy under Ga-rich conditions at growth temperatures from 780°C and 900°C. All layers exhibited very smooth surface morphology with monolayer steps as revealed by atomic force microscopy. Hall-effect measurements showed that the sample grown at 900°C had carrier concentration of 9.8 × 1017 cm−3 while the sample grown at 780°C had resistivity too high to obtain reliable measurements. Secondary-ion mass spectroscopy revealed O and Si concentrations of <1017 cm−3 in the sample grown at 900°C but >1017 cm−3 in the sample grown at 780°C. The trend for the atomic concentrations of O and Si, which are common donor impurities in GaN, was thus contrary to the trend of the carrier concentration. The full-width at half-maximum for x-ray rocking curves obtained across the GaN(0002) and GaN(101¯\documentclass[12pt]{minimal} \usepackage{amsmath} \usepackage{wasysym} \usepackage{amsfonts} \usepackage{amssymb} \usepackage{amsbsy} \usepackage{mathrsfs} \usepackage{upgreek} \setlength{\oddsidemargin}{-69pt} \begin{document}$$ \bar{1} $$\end{document}5) reflections for the sample grown at 900°C was 62 arcsec and 587 arcsec, respectively. The half-width increased with decreasing growth temperature. The atomic concentrations of O and Si are too low to account for the unintentional background doping levels. A possible explanation proposed in early reports for the background doping is N-vacancies.