Angle Sensor for a High-Speed Galvo Scanner

被引：0

作者：

Gilyazov M.R. ^{[1
]}

Nagulin K.Y. ^{[1
]}

Gil’mutdinov A.K. ^{[1
]}

机构：

[1] Tupolev Kazan National Research Technical University, ul. Karla Marksa 10, Kazan

来源：

Russian Aeronautics | 2018年 / 61卷 / 3期

关键词：

angle sensor; galvo scanner;

D O I：

10.3103/S1068799818030261

中图分类号：

学科分类号：

摘要：

The capacitive angle sensor of the galvanometer scanner is designed. The task of developing a rotation angle sensor in the range of ±20 deg for scanning speeds of up to 20 kHz is being solved. The linear dependence of the change in capacitance on the angle in the considered range is achieved. © 2018, Allerton Press, Inc.

引用

页码：495 / 498

页数：3

共 50 条

[41] Novel Contact Sensor for High-Speed Machining
Bourny, Valery
Swingedouw, Florent
Capitaine, Thierry
Lorthois, Aurelien
Dubois, Jerome
Senlis, Jacky
JOURNAL OF MANUFACTURING SCIENCE AND ENGINEERING-TRANSACTIONS OF THE ASME, 2012, 134 (06):
[42] Rotation angle measurement of high-speed flying object
Kadowaki, Tomohiko
Kobayashi, Kazuyuki
Watanabe, Kajiro
2006 SICE-ICASE INTERNATIONAL JOINT CONFERENCE, VOLS 1-13, 2006, : 3391 - +
[43] SENSITIVE, HIGH-SPEED ANGLE-MEASURING GAUGE
PALMER, CH
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1970, 60 (05) : 726 - &
[44] A HIGH-SPEED SPINNER FOR MAGIC ANGLE SPINNING NMR
VANDIJK, PAS
SCHUT, W
VANOS, JWM
MENGER, EM
VEEMAN, WS
JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1980, 13 (12): : 1309 - 1310
[45] Wide-area scanner for high-speed atomic force microscopy
Watanabe, Hiroki
Uchihashi, Takayuki
Kobashi, Toshihide
Shibata, Mikihiro
Nishiyama, Jun
Yasuda, Ryohei
Ando, Toshio
REVIEW OF SCIENTIFIC INSTRUMENTS, 2013, 84 (05):
[46] A Parallel Kinematic Scanner Designed for High-Speed Atomic Force Microscopy
He, Xianbin
Cai, Kunhai
Tian, Yanling
Cui, Liangyu
Cai, Kunhai
Tian, Yanling
Liu, Xianping
2017 IEEE INTERNATIONAL CONFERENCE ON MANIPULATION, MANUFACTURING AND MEASUREMENT ON THE NANOSCALE (3M-NANO), 2017, : 46 - 49
[47] A Z-scanner Design for High-Speed Scanning Probe Microscopy
Yong, Yuen Kuan
Mohemani, S. O. Reza
2012 IEEE INTERNATIONAL CONFERENCE ON ROBOTICS AND AUTOMATION (ICRA), 2012, : 4780 - 4785
[48] MODELING THE PERFORMANCE OF A HIGH-SPEED SCAN MIRROR FOR AN AIRBORNE LINE SCANNER
FENG, XF
SCHOTT, JR
GALLAGHER, TW
OPTICAL ENGINEERING, 1994, 33 (04) : 1214 - 1222
[49] High-speed Glossy Surface Scanner with Estimation of Surface Reflectance Properties
Ishii, Idaku
Tsunoda, Shin-ichi
Yamamoto, Kenkichi
IECON: 2009 35TH ANNUAL CONFERENCE OF IEEE INDUSTRIAL ELECTRONICS, VOLS 1-6, 2009, : 1956 - +
[50] QUANTITATIVE-ANALYSIS METHODS FOR A HIGH-SPEED COMPUTED TOMOGRAPHY SCANNER
FRONDLICH, D
BEER, Z
BENZEEV, D
INBAR, D
ZAKLAD, H
JOURNAL OF COMPUTER ASSISTED TOMOGRAPHY, 1977, 1 (02) : 253 - 253

← 1 2 3 4 5 →