Current State of Development of a Microscope Operating at a Wavelength of 3.37 nm at the Institute of Physics of Microstructures of the Russian Academy of Sciences

被引：10

作者：

Malyshev I.V. ^{[1
]}

Pestov A.E. ^{[1
]}

Polkovnikov V.N. ^{[1
]}

Salashchenko N.N. ^{[1
]}

Toropov M.N. ^{[1
]}

Chkhalo N.I. ^{[1
]}

机构：

[1] Institute of Physics of Microstructures, Russian Academy of Sciences, Nizhny Novgorod

来源：

Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques | 2018年 / 12卷 / 6期

基金：

俄罗斯基础研究基金会;

关键词：

aspherical optics; soft X-ray microscopy; water window;

D O I：

10.1134/S1027451019010129

中图分类号：

学科分类号：

摘要：

Abstract: The study is devoted to the development of a microscope operating at a wavelength of 3.37 nm in the water window. A Schwarzschild lens with a multilayer coating is used as an image-forming objective lens. The microscope has a theoretical resolution of up to 13 nm and a field of view of 7.3–97.5 µm depending on the magnification. A low depth of focus (±37.5 nm) allows one to implement the z-tomography of samples. A schematic diagram of the microscope, the result of aspherizing the mirror collector, and the results of measuring the roughness of the mirror substrates are given. A three-point method for mounting the mirrors and also a magnetic damper operating on Foucault currents are described. The exposure time is estimated. © 2018, Pleiades Publishing, Ltd.

引用

页码：1253 / 1263

页数：10

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