共 31 条
- [23] Fabrication of a high-aspect-ratio sub-micron tool using a cathode coated with stretched-out insulating layers REVIEW OF SCIENTIFIC INSTRUMENTS, 2013, 84 (09):
- [25] Fabrication of fused-silica sub-micron gratings with high aspect ratio by transfer holographic resist masks with ICP dry etching OPTOELECTRONICS AND ADVANCED MATERIALS-RAPID COMMUNICATIONS, 2010, 4 (10): : 1465 - 1468
- [27] HIGH-ASPECT-RATIO SUB-MICRON TRENCH ETCHING ON SOI USING WET METAL-ASSISTED CHEMICAL ETCHING (MACE) PROCESS 2016 IEEE 29TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2016, : 447 - 450
- [30] Single-pulse femtosecond laser Bessel beams drilling of high-aspect-ratio microholes based on electron dynamics control INTERNATIONAL SYMPOSIUM ON OPTOELECTRONIC TECHNOLOGY AND APPLICATION 2014: ADVANCED DISPLAY TECHNOLOGY; AND NONIMAGING OPTICS: EFFICIENT DESIGN FOR ILLUMINATION AND SOLAR CONCENTRATION, 2014, 9296