Automated Hybridization of X-ray Absorber Elements A Path to Large Format Microcalorimeter Arrays

被引：0
|
作者：
Samuel J. Moseley
Christine A. Allen
Nicholas Costin
Richard Kelley
Caroline Kilbourne
Timothy Miller
机构：
[1] NASA Goddard Space Flight Center Code 553,
[2] MEI Technologies,undefined
[3] Inc.,undefined
来源：
Journal of Low Temperature Physics | 2008年 / 151卷
关键词：
X-ray absorbers; Mercury telluride; SU-8; Automated tile application; Adhesive attachment; XeF2 etching; 07.85.Nc; 07.20.Fw; 95.55.Ka;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
We have developed an automated die-scale process for the attachment of X-ray absorbers onto microcalorimeters. Here, we describe the process for the production of absorber tiles on a handle wafer, their attachment to the microcalorimeter, and the removal of the supporting handle wafer. The process is shown to be a robust path to large format arrays of microcalorimeters.
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页码：418 / 423
页数：5
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