Properties of conical microstructures formed on silicon surfaces via nanosecond laser ablation under vacuum

被引：0
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作者：
Ji-Hong Zhao
Chun-Hao Li
Jian-Nan Wang
机构：
[1] Jilin University,State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering
[2] Jilin University,College of Materials Science and Engineering
来源：
Optical and Quantum Electronics | 2016年 / 48卷
关键词：
Silicon; Nanosecond laser pulses; Conical microstructures; IR absorption; Superhydrophobic;
D O I：
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学科分类号：
摘要：
We fabricated conical microstructures onto a silicon surface via nanosecond laser ablation at 355 nm in a vacuum. The silicon surface coved with these conical microstructures exhibited strong optical absorbance for UV–VIS–NIR wavelengths (from 0.25 to 2.5 μm). The transmission properties at infrared wavelengths (2.5–24 μm) for this ns laser ablated silicon was also discussed. In addition, the microstructured silicon surface exhibited excellent super-hydrophobicity with the highest water contact angle near 160°.
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