Development of the SC-RTA Process for Fabrication of Sol-Gel Based Silica-on-Silicon Integrated Optic Components

被引：0
|
作者：
R.R.A. Syms
A.S. Holmes
W. Huang
V.M. Schneider
M. Green
机构：
[1] Imperial College,Optical and Semiconductor Devices Section, Dept. of Electrical and Electronic Engineering
来源：
Journal of Sol-Gel Science and Technology | 1998年 / 13卷
关键词：
sol-gel glass; silica-on-silicon; integrated optics; planar lightwave circuit;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
The SC-RTA process for fabricating silica-on-silicon PLCs from sol-gel glass is described. A wide range of glasses has been deposited, process temperatures have been reduced, and components fabricated by reactive ion etching, reflow and burial of channel guides have shown steadily decreasing loss. Propagation losses are ≈0.2 dB/cm at λ = 1.523 μm in a high Δn system. Passive components demonstrated include tree-structured power splitters and thermo-optic switches.
引用
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页码：509 / 516
页数：7
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