Design of microsensors for pressure measurement

被引：0
|
作者：
É. L. Egiazaryan
机构：
来源：
Measurement Techniques | 1997年 / 40卷
关键词：
Silicon Wafer; Casing; Sense Element; Lead Wire; Output Resistance;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Establishing a standard methodology for the design of microsensors is a fairly formidable task, in light of the wide range of design and fabrication methods that exist. These methods differ in particular in the material and method of production of the sensing element. An integrated method of microsensor design is presented in this article on the basis of an analysis of the literature data and special experiments conducted for that purpose.
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页码：1163 / 1166
页数：3
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