user

Design of microsensors for pressure measurement

被引：0
|
作者：
É. L. Egiazaryan
机构：
来源：
Measurement Techniques | 1997年 / 40卷
关键词：
Silicon Wafer; Casing; Sense Element; Lead Wire; Output Resistance;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Establishing a standard methodology for the design of microsensors is a fairly formidable task, in light of the wide range of design and fabrication methods that exist. These methods differ in particular in the material and method of production of the sensing element. An integrated method of microsensor design is presented in this article on the basis of an analysis of the literature data and special experiments conducted for that purpose.
引用
收藏
页码：1163 / 1166
页数：3
相关论文
共 50 条
  • [1] Design of microsensors for pressure measurement
    Egiazaryan, EL
    MEASUREMENT TECHNIQUES, 1997, 40 (12) : 1163 - 1166
  • [2] SPECIFIC FEATURES IN PRESSURE MICROSENSORS DESIGN
    Lache, Simona
    Luculescu, Marius
    ANNALS OF DAAAM FOR 2008 & PROCEEDINGS OF THE 19TH INTERNATIONAL DAAAM SYMPOSIUM, 2008, : 737 - 738
  • [3] Miniature optical fiber pressure microsensors for in vivo measurement of intramuscular pressure
    Cottler, P. S.
    Blevins, D.
    Averett, J.
    Wavering, T. A.
    Morrow, D. A.
    Shin, A. Y.
    Kaufman, K. R.
    OPTICAL FIBERS AND SENSORS FOR MEDICAL DIAGNOSTICS AND TREATMENT APPLICATIONS VII, 2007, 6433
  • [4] Design and fabrication of field emission -based pressure microsensors
    Badi, N
    He, K
    Nair, A
    Bensaoula, A
    TECHNICAL DIGEST OF THE 17TH INTERNATIONAL VACUUM NANOELECTRONICS CONFERENCE, 2004, : 24 - 25
  • [5] A design tool for pressure microsensors based on FEM simulations
    Bistue, G
    Elizalde, JG
    GarciaAlonso, S
    Castano, E
    Gracia, FJ
    GarciaAlonso, A
    SENSORS AND ACTUATORS A-PHYSICAL, 1997, 62 (1-3) : 591 - 594
  • [6] Strain measurement with microsensors
    Itoh, T
    Springer, GS
    JOURNAL OF COMPOSITE MATERIALS, 1997, 31 (19) : 1944 - 1984
  • [7] Mechanical Microsensors for Pulse Measurement
    Garcia-Castro, F.
    De Sagazan, O.
    Simon, C.
    Coulon, N.
    le Bihan, F.
    WEARABLE SENSORS AND SYSTEMS 1 -AND - MICROFABRICATED AND NANOFABRICATED SYSTEMS FOR MEMS/NEMS 14, 2018, 86 (16): : 71 - 78
  • [8] Chemical microsensors for measurement systems
    Siegel, M
    IEEE INSTRUMENTATION & MEASUREMENT MAGAZINE, 2004, 7 (02) : 27 - 32
  • [9] Design, fabrication and characterization of a thermal microsystem integrated with heaters, pressure and temperature microsensors
    Lee, Man
    Lee, Yi-Kuen
    Zohar, Yitshak
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2011, 21 (12)
  • [10] Analytical Solutions of Sensitivity for Pressure Microsensors
    Gong, Shih-Chin
    Lee, Chengkuo
    IEEE SENSORS JOURNAL, 2001, 1 (04) : 340 - 344
12345