Advanced method for the accurate measurement of tilt angle in a transmission electron microscopy goniometer

被引：0
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作者：
Ji-Hyun Lee
Hoyoung Suh
Sang-Gil Lee
Jin-Gyu Kim
Seung Jo Yoo
机构：
[1] Korea Basic Science Institute (KBSI),Electron Microscopy Research Center
来源：
Journal of Analytical Science and Technology | / 9卷
关键词：
Electron tomography; Calibration specimen; Goniometer; Nanohole patterning; Focused ion beam;
D O I：
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学科分类号：
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