Sheet Resistance of the TiAlNiAu Thin-Film Metallization of Ohmic Contacts to Nitride Semiconductor Structures

被引：0

作者：

N. A. Torkhov

机构：

[1] Scientific and Research Institute of Semiconductors,

[2] Tomsk State University of Control Systems and Radio Electronics,undefined

[3] Tomsk State University,undefined

来源：

Semiconductors | 2019年 / 53卷

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摘要：

引用

页码：28 / 36

页数：8

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