Microstructural development and electrical properties of lead zirconate titanate composite films

被引:0
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作者
S.-T. Chen
J.-M. Wu
T.-S. Yeh
L.-J. Hu
机构
[1] National Tsing Hua University,Department of Materials Science and Engineering
[2] Chung-Shan Institute of Science and Technology,Materials & Electro
来源
关键词
Perovskite; Diol; Buffer Layer; Perovskite Phase; Lead Zirconate Titanate;
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学科分类号
摘要
Dihydroxyalcohols (DIOL route) and 2-methoxyethanol (MOE route) are two of the most commonly used solvents in preparing sol-gel lead zirconate titanate (PZT) films. The employment of the PT(MOE) film as a buffer layer for PZT(DIOL) films not only offers advantages of more precise film thickness and better adhesion to substrate, but also reduces the crystallization temperature, improves the surface smoothness, and increases the grain size of the PZT(DIOL)/PT(MOE) composite films. The PT (MOE) buffer layer also improves electrical properties, such as polarization-electric field behavior, fatigue endurance, and leakage behavior, of PZT films.
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页码:4221 / 4226
页数:5
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