X-Ray Reflectivity Study of Formation of Multilayer Porous Anodic Oxides of Silicon

被引：0
|
作者：
Vitali Parkhutik
Y. Chu
H. You
Z. Nagy
P.A. Montano
机构：
[1] Technical University of Valencia,Argonne National Laboratory
[2] MSD,undefined
来源：
Journal of Porous Materials | 2000年 / 7卷
关键词：
X-ray reflectivity; anodic oxide; oscillations;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Present work reports a study of the morphology of thin (50–600 Å) porous oxides of silicon grown in a special regime of the oscillating anodic potential. X-ray reflectivity (in-situ and ex-situ) was applied to analyze the morphology of oxides. It has been established that there is a direct correlation between a number of oscillations of potential during the oxide growth and the structure of oxide: it has a multi-layer structure with the number of layers corresponding to the number of oscillations.
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页码：27 / 31
页数：4
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