An analysis of the polarization component of the measurement error in heterodyne laser interferometer measurement systems

被引：0
|
作者：
S. G. Grishin
机构：
[1] Stankin Moscow State Technological University,
来源：
Measurement Techniques | 2012年 / 54卷
关键词：
polarization component of the measurement error; heterodyne interferometry; laser measurement system;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
The reasons for the occurrence of the polarization component of the measurement error in heterodyne laser interferometer measuring systems are considered. An analysis of this component is given.
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页码：1378 / 1387
页数：9
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