Fabrication of sapphire rib waveguides using a femtosecond laser

被引：0
|
作者：
Jue Wang
Qing Tao
Chen Hu
Zhong-sheng Zhai
Jian Cheng
Dun Liu
机构：
[1] Hubei University of Technology,School of Mechanical Engineering
[2] Hubei University of Technology,Hubei Key Laboratory of Modern Manufacturing Quantity Engineering, School of Mechanical Engineering
来源：
Optoelectronics Letters | 2019年 / 15卷
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摘要：
We demonstrate a method for fabricating sapphire rib waveguides with femtosecond laser micromachining technology. Finite difference beam propagation method (FD-BPM) is applied to design sapphire rib waveguides. We explore the process of etching on a sapphire substrate surface via direct laser ablation. Rib waveguides that satisfies the dimensions of our design were fabricated. Actual light propagation performance is tested, and with the cut-back method, the insertion loss of 2.9±0.5 dB/cm is measured.
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页码：190 / 194
页数：4
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