The reaction between a TiNi shape memory thin film and silicon

被引：0
|
作者：
Susanne Stemmer
Gerd Duscher
Christina Scheu
Arthur H. Heuer
Manfred Rühle
机构：
[1] Case Western Reserve University,Department of Materials Science and Engineering
[2] Institut für Werkstoffwissenschaft,Max
[3] Katholieke Universiteit Leuven,Planck
来源：
Journal of Materials Research | 1997年 / 12卷
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
The reaction between shape-memory TiNi thin films and silicon has been characterized by conventional, analytical, and high-resolution transmission electron microscopy. A reaction layer is formed during the 525 °C post-deposition crystallization anneal of the sputter-deposited TiNi, and consists of several phases: Ti2Ni, a nickel silicide, and a ternary titanium nickel silicide. The mechanism for the interlayer formation is discussed.
引用
收藏
页码：1734 / 1740
页数：6
相关论文
共 50 条
  • [1] The reaction between a TiNi shape memory thin film and silicon
    Stemmer, S
    Duscher, G
    Scheu, C
    Heuer, AH
    Ruhle, M
    JOURNAL OF MATERIALS RESEARCH, 1997, 12 (07) : 1734 - 1740
  • [2] Flash evaporation of TiNi shape memory thin film for microactuators
    Makino, E
    Uenoyama, M
    Shibata, T
    SENSORS AND ACTUATORS A-PHYSICAL, 1998, 71 (03) : 187 - 192
  • [3] THIN-FILM PROCESSING OF TINI SHAPE MEMORY ALLOY
    WALKER, JA
    GABRIEL, KJ
    MEHREGANY, M
    SENSORS AND ACTUATORS A-PHYSICAL, 1990, 21 (1-3) : 243 - 246
  • [4] Micromachining of TiNi shape memory thin film for fabrication of micropump
    Makino, E
    Mitsuya, T
    Shibata, T
    SENSORS AND ACTUATORS A-PHYSICAL, 2000, 79 (03) : 251 - 259
  • [5] Characteristic of TiNi(Cu) shape memory thin film based on micropump
    Zhang, Huijun
    Qiu, Chengjun
    SECOND INTERNATIONAL CONFERENCE ON SMART MATERIALS AND NANOTECHNOLOGY IN ENGINEERING, 2009, 7493
  • [6] Stabilization effect of martensite and shape memory effect of tini thin film
    Liu, Xiaopeng
    Jin, Wei
    Cao, Mingzhou
    Yang, Dazhi
    Chen, Feixia
    Jinshu Xuebao/Acta Metallurgica Sinica, 2002, 38 (02): : 193 - 195
  • [7] Stabilization effect of martensite and shape memory effect of TiNi thin film
    Liu, XP
    Jin, W
    Cao, MZ
    Yang, DZ
    Chen, FX
    ACTA METALLURGICA SINICA, 2002, 38 (02) : 193 - 195
  • [8] Patterning and bonding of TiNi shape memory thin film for fabrication of micropump
    Makino, E
    Mitsuya, T
    Nakatsuji, T
    Shibata, T
    DESIGN, TEST, AND MICROFABRICATION OF MEMS AND MOEMS, PTS 1 AND 2, 1999, 3680 : 1030 - 1037
  • [9] Residual stress of TiNi shape memory alloy thin films on silicon substrate
    Jiang, BH
    Wu, TB
    Qi, X
    Wang, L
    Xu, D
    Cai, BC
    PRICM 4: FORTH PACIFIC RIM INTERNATIONAL CONFERENCE ON ADVANCED MATERIALS AND PROCESSING, VOLS I AND II, 2001, : 1517 - 1520
  • [10] Bimorph-type microactuator using TiNi shape-memory thin film
    Ishida, A
    Sato, M
    Yoshikawa, W
    Tabata, O
    SHAPE MEMORY MATERIALS AND ITS APPLICATIONS, 2001, 394-3 : 487 - 490
12345