Modeling and Optimization of the Synthesis of Fine-Particle Powders in High-Frequency Plasma

The synthesis of SiO2, Al2O3, BaO, PbO, B2O3, ZnO, and SiO2–Al2O3–BaO fine-particle powders was studied experimentally and optimized. The metal oxides, silicon, and an SiO2–Al2O3–BaO mixture were treated in an argon–oxygen or air high-frequency induction plasma, whereupon amorphous layers were deposited onto silicon substrates. Heat treatment of these layers at 1473 K for 15 min yielded continuous amorphous dielectric films with desired properties.