Ion Beam Mixing of Sb/Glass Studied by Rutherford Backscattering Spectrometry

被引：0
|
作者：
A. S. Belal
机构：
[1] Al-Jouf University,Department of Science
来源：
Arabian Journal for Science and Engineering | 2012年 / 37卷
关键词：
Ion beam mixing; Rutherford backscattering spectrometry (RBS); Sputtering;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Room temperature ion beam mixing of a Sb/glass system, induced by 300 keV collimated Ar+ ion beams from the Jordan Van de Graff Accelerator, was studied by means of Rutherford backscattering spectrometry (RBS). The RBS spectra of 2.0 MeV He++ ions were collected for the system before, after and at various irradiated doses. The sputtering effect and the kinetics of the atomic mixing were successfully analyzed.
引用
收藏
页码：201 / 207
页数：6
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