Ion Beam Mixing of Sb/Glass Studied by Rutherford Backscattering Spectrometry

被引:0
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作者
A. S. Belal
机构
[1] Al-Jouf University,Department of Science
关键词
Ion beam mixing; Rutherford backscattering spectrometry (RBS); Sputtering;
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摘要
Room temperature ion beam mixing of a Sb/glass system, induced by 300 keV collimated Ar+ ion beams from the Jordan Van de Graff Accelerator, was studied by means of Rutherford backscattering spectrometry (RBS). The RBS spectra of 2.0 MeV He++ ions were collected for the system before, after and at various irradiated doses. The sputtering effect and the kinetics of the atomic mixing were successfully analyzed.
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页码:201 / 207
页数:6
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