A Fuzzy-P controller of an active reaction force compensation (RFC) mechanism for a linear motor motion stage

被引：0

作者：

Duc Canh Nguyen

Hyeong-Joon Ahn

机构：

[1] Graduate School,Department of Mechanical Engineering

[2] Soongsil University,Department of Mechanical Engineering

[3] Soongsil University,undefined

来源：

International Journal of Precision Engineering and Manufacturing | 2015年 / 16卷

关键词：

Active reaction force compensation; Linear motor motion stage; Fuzzy-P controller;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

Residual vibration of system base due to high-speed motion of a stage may significantly reduce life span and productivity of the manufacturing equipment. Although a passive reaction force compensation (RFC) mechanism was developed to reduce residual vibration of a linear motor motion stage, the passive RFC mechanism should be redesigned according to variation of motion profiles. In this paper, we develop a fuzzy-P (proportional) controller of an active RFC mechanism to automatically tune the gain according to variation of motion profiles. First, frequency components of motion profiles for a linear motion stage are analyzed and performances of the passive RFC mechanism are approximately evaluated using a motion profile analysis. An active RFC mechanism with an additional control coil is introduced to overcome limitation of the passive RFC mechanism and a fuzzy rule is proposed to automatically tune the P controller of the active RFC mechanism according to variations of motion profiles. Simulations and experiments are performed to show effectiveness of the proposed fuzzy rule for tuning the P control gain of the active RFC mechanism.

引用

页码：1067 / 1074

页数：7