Measurements of the Thermophysical Characteristics of Thin-Film Metal Filters for Extreme-Ultraviolet Radiation

被引：0
|
作者：
A. Ya. Lopatin
V. I. Luchin
N. N. Salashchenko
N. N. Tsybin
N. I. Chkhalo
机构：
[1] Institute for Physics of Microstructures,
[2] Russian Academy of Sciences,undefined
来源：
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques | 2023年 / 17卷
关键词：
coefficient of thermal conductivity; emissivity; magnetron sputtering; thin-film metal filter; extreme ultraviolet radiation; Wiedemann–Franz law; pyrometry; current heating; heat loads; temperature coefficient of resistance;
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页码：1323 / 1331
页数：8
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