Measurements of the Thermophysical Characteristics of Thin-Film Metal Filters for Extreme-Ultraviolet Radiation

被引：0
|
作者：
A. Ya. Lopatin
V. I. Luchin
N. N. Salashchenko
N. N. Tsybin
N. I. Chkhalo
机构：
[1] Institute for Physics of Microstructures,
[2] Russian Academy of Sciences,undefined
来源：
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques | 2023年 / 17卷
关键词：
coefficient of thermal conductivity; emissivity; magnetron sputtering; thin-film metal filter; extreme ultraviolet radiation; Wiedemann–Franz law; pyrometry; current heating; heat loads; temperature coefficient of resistance;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：1323 / 1331
页数：8
相关论文
共 50 条
  • [1] Measurements of the Thermophysical Characteristics of Thin-Film Metal Filters for Extreme-Ultraviolet Radiation
    Lopatin, A. Ya.
    Luchin, V. I.
    Salashchenko, N. N.
    Tsybin, N. N.
    Chkhalo, N. I.
    JOURNAL OF SURFACE INVESTIGATION, 2023, 17 (06): : 1323 - 1331
  • [2] Extreme-ultraviolet calibration of thin-film Zr filters for the cosmic hot interstellar plasma spectrometer
    Hemphill, Richelieu
    Pelizzo, Maria G.
    Hurwitz, Mark
    Applied Optics, 2002, 41 (22): : 4680 - 4685
  • [3] Extreme-ultraviolet calibration of thin-film Zr filters for the cosmic hot interstellar plasma spectrometer
    Hemphill, R
    Pelizzo, MG
    Hurwitz, M
    APPLIED OPTICS, 2002, 41 (22) : 4680 - 4685
  • [4] Note: Thermally stable thin-film filters for high-power extreme-ultraviolet applications
    Tarrio, C.
    Berg, R. F.
    Lucatorto, T. B.
    Lairson, B.
    Lopez, H.
    Ayers, T.
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2015, 86 (11):
  • [5] New extreme ultraviolet transmission measurements of two thin-film filters for imaging of plasmaspheric cold ions
    Molyneux, Philippa
    Veach, Todd
    Davis, Michael
    Fletcher, Gregory
    Goldstein, Jerry
    JOURNAL OF ASTRONOMICAL TELESCOPES INSTRUMENTS AND SYSTEMS, 2024, 10 (01)
  • [6] Emission Characteristics of a Laser-Plasma Source of Extreme Ultraviolet Radiation with Thin-Film Targets
    Lopatin, A. Ya.
    Luchin, V. I.
    Nachay, A. N.
    Perekalov, A. A.
    Pestov, A. E.
    Salashchenko, N. N.
    Soloviev, A. A.
    Tsybin, N. N.
    Chkhalo, N. I.
    TECHNICAL PHYSICS, 2024, 69 (05) : 1259 - 1263
  • [7] Freestanding Silicon Thin-Film Filters with High Transmission in Extreme Ultraviolet Range
    Li Xiaoran
    Chen Yiwen
    Xie Mojie
    Zhao Jiaoling
    ACTA OPTICA SINICA, 2023, 43 (19)
  • [8] Long-term changes in AI thin-film extreme ultraviolet filters
    Schmidt, Jiri
    Kolacek, Karel
    Frolov, Alexandr
    Straus, Jaroslav
    Hoffer, Petr
    Stelmashuk, Vitaliy
    Tuholukov, Andrii
    Jiricek, Petr
    Houdkova, Jana
    APPLIED OPTICS, 2021, 60 (28) : 8766 - 8773
  • [9] Aging of Al thin film extreme ultraviolet filters
    Kolacek, Karel
    Frolov, Alexandr
    Schmidt, Jiri
    Straus, Jaroslav
    Hoffer, Petr
    Stelmashuk, Vitaliy
    Lukes, Petr
    Juha, Libor
    OPTICS DAMAGE AND MATERIALS PROCESSING BY EUV/X-RAY RADIATION VII, 2019, 11035
  • [10] Multilayer thin-film filters of extreme ultraviolet and soft X-ray spectral regions
    Volodin B.A.
    Gusev S.A.
    Drozdov M.N.
    Zuev S.Yu.
    Klyuenkov E.B.
    Lopatin A.Ya.
    Luchin V.I.
    Pestov A.E.
    Salashchenko N.N.
    Tsybin N.N.
    Chkhalo N.I.
    Bulletin of the Russian Academy of Sciences: Physics, 2010, 74 (1) : 46 - 49
12345