Dislocation Evolution and Microstructural Properties on GaN Grown on Cone Patterned Sapphire Substrate

被引:0
|
作者
Gui Huanyou Wang
Qiaolai Jin
机构
[1] Academy of Electronic Information and Electrical Engineering,
[2] Xiangnan University,undefined
[3] School of Information and Optoelectronics Science and Technology,undefined
[4] South China Normal University,undefined
[5] Institute of Physics and Information Science,undefined
[6] Hunan Normal University,undefined
关键词
GaN; patterned sapphire substrate; threading dislocation;
D O I
暂无
中图分类号
学科分类号
摘要
引用
收藏
页码:1567 / 1571
页数:4
相关论文
共 50 条
  • [21] The effect of nucleation layer thickness on the structural evolution and crystal quality of bulk GaN grown by a two-step process on cone-patterned sapphire substrate
    Shang, Lin
    Zhai, Guangmei
    Mei, Fuhong
    Jia, Wei
    Yu, Chunyan
    Liu, Xuguang
    Xu, Bingshe
    JOURNAL OF CRYSTAL GROWTH, 2016, 442 : 89 - 94
  • [22] Characteristics comparison between GaN epilayers grown on patterned and unpatterned sapphire substrate (0001)
    Song, J. C.
    Kang, D. H.
    Shim, B. Y.
    Ko, E. A.
    Kim, D. W.
    Kannappan, S.
    Lee, C. R.
    ADVANCED MATERIALS AND PROCESSING IV, 2007, 29-30 : 355 - 358
  • [23] Reduction of threading dislocations in GaN grown on patterned sapphire substrate masked with serpentine channel
    Khan, Muhammad Saddique Akbar
    Liao, Hui
    Yu, Guo
    Iqbal, Imran
    Lei, Menglai
    Lang, Rui
    Mi, Zehan
    Chen, Huanqing
    Zong, Hua
    Hu, Xiaodong
    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2021, 134
  • [24] Characteristics comparison between GaN epilayers grown on patterned and unpatterned sapphire substrate (0001)
    Song, Jae-Chul
    Lee, Seon-Ho
    Lee, In-Hwan
    Seol, Kyeong-Won
    Kannappan, Santhakurnar
    Lee, Cheul-Ro
    JOURNAL OF CRYSTAL GROWTH, 2007, 308 (02) : 321 - 324
  • [25] Effect of nucleation time on GaN layer grown on different shapes of patterned sapphire substrate
    Taib, M. Ikram Md
    Waheeda, S. N.
    Zainal, N.
    INTERNATIONAL JOURNAL OF NANOTECHNOLOGY, 2022, 19 (2-5) : 327 - 335
  • [26] Internal Quantum Efficiency of InGaN/GaN Led Structures Grown on a Patterned Sapphire Substrate
    Prudaev, I. A.
    Romanov, I. S.
    Novikov, Vad. A.
    Marmalyuk, A. A.
    Kureshov, V. A.
    Sabitov, D. R.
    Mazalov, A. V.
    RUSSIAN PHYSICS JOURNAL, 2014, 57 (05) : 657 - 661
  • [27] Improvement of Epitaxial GaN Films Grown on Patterned Sapphire Substrate by Growth Mode Control
    Kim, Dae-Sik
    Lee, Chang-Min
    Jeong, Woo Seop
    Cho, Seung Hee
    Jhin, Junggeun
    Byun, Dongjin
    JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2016, 16 (11) : 11575 - 11579
  • [28] Internal Quantum Efficiency of InGaN/GaN Led Structures Grown on a Patterned Sapphire Substrate
    I. A. Prudaev
    I. S. Romanov
    Vad. A. Novikov
    А. А. Marmalyuk
    V. A. Kureshov
    D. R. Sabitov
    А. V. Маzalov
    Russian Physics Journal, 2014, 57 : 657 - 661
  • [29] Comparison of InGaN-Based LEDs Grown on Conventional Sapphire and Cone-Shape-Patterned Sapphire Substrate
    Lee, Jae-Hoon
    Lee, Dong-Yul
    Oh, Bang-Won
    Lee, Jung-Hee
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 2010, 57 (01) : 157 - 163
  • [30] Effect of grain coalescence on dislocation and stress in GaN films grown on nanoscale patterned sapphire substrates
    Pan, Zuojian
    Chen, Zhizhong
    Chen, Yiyong
    Zhang, Haodong
    Yang, Han
    Hu, Ling
    Kang, Xiangning
    Yuan, Ye
    Jia, Chuanyu
    Liang, Zhiwen
    Wang, Qi
    Zhang, Guoyi
    Shen, Bo
    CRYSTENGCOMM, 2024, 26 (05) : 620 - 630