共 50 条
- [21] Microstructural characterization at the interface of Al2O3/ZnO/Al2O3 thin films grown by atomic layer deposition PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS, 2011, 248 (07): : 1634 - 1638
- [22] A microstructural study of the thermal stability of atomic layer deposited Al2O3 thin films MICROSCOPY OF SEMICONDUCTING MATERIALS 2003, 2003, (180): : 397 - 400
- [24] Properties of atomic layer deposited Al2O3/ZnO dielectric films grown at low temperature for RF MEMS Micromachining and Microfabrication Process Technology X, 2005, 5715 : 159 - 166
- [27] Optical and electrical properties of Al-doped ZnO thin films by atomic layer deposition Journal of Materials Science: Materials in Electronics, 2020, 31 : 17365 - 17374
- [28] Investigation of atomic-layer-deposited ruthenium nanocrystal growth on SiO2 and Al2O3 films JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2007, 25 (04): : 775 - 780