The road to the realization of complex integrated circuits based on graphene remains an open issue so far. Current graphene based integrated circuits are limited by low integration depth and significant doping variations, representing major road blocks for the success of graphene in future electronic devices. Here we report on the realization of graphene based integrated inverters and ring oscillators. By using an optimized process technology for high-performance graphene transistors with local back-gate electrodes we demonstrate that complex graphene based integrated circuits can be manufactured reproducibly, circumventing problems associated with doping variations. The fabrication process developed here is scalable and fully compatible with conventional silicon technology. Therefore, our results pave the way towards applications based on graphene transistors in future electronic devices.
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Hong Kong Univ Sci & Technol, Dept Elect & Comp Engn, Hong Kong, Peoples R ChinaHong Kong Univ Sci & Technol, Dept Elect & Comp Engn, Hong Kong, Peoples R China
Zheng, Zheyang
Song, Wenjie
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Hong Kong Univ Sci & Technol, Dept Elect & Comp Engn, Hong Kong, Peoples R ChinaHong Kong Univ Sci & Technol, Dept Elect & Comp Engn, Hong Kong, Peoples R China
Song, Wenjie
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Zhang, Li
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Yang, Song
Wei, Jin
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Hong Kong Univ Sci & Technol, Dept Elect & Comp Engn, Hong Kong, Peoples R ChinaHong Kong Univ Sci & Technol, Dept Elect & Comp Engn, Hong Kong, Peoples R China
Wei, Jin
Chen, Kevin J.
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Hong Kong Univ Sci & Technol, Dept Elect & Comp Engn, Hong Kong, Peoples R ChinaHong Kong Univ Sci & Technol, Dept Elect & Comp Engn, Hong Kong, Peoples R China
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Univ Massachusetts, Dept Polymer Sci & Engn, Amherst, MA 01003 USAUniv Massachusetts, Dept Polymer Sci & Engn, Amherst, MA 01003 USA
Naik, Aditi R.
Kim, Jae Joon
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Univ Massachusetts, Dept Polymer Sci & Engn, Amherst, MA 01003 USAUniv Massachusetts, Dept Polymer Sci & Engn, Amherst, MA 01003 USA
Kim, Jae Joon
Usluer, Ozlem
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Univ Massachusetts, Dept Polymer Sci & Engn, Amherst, MA 01003 USAUniv Massachusetts, Dept Polymer Sci & Engn, Amherst, MA 01003 USA
Usluer, Ozlem
Arellano, D. Leonardo Gonzalez
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Univ Massachusetts, Dept Polymer Sci & Engn, Amherst, MA 01003 USAUniv Massachusetts, Dept Polymer Sci & Engn, Amherst, MA 01003 USA
Arellano, D. Leonardo Gonzalez
Secor, Ethan B.
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Northwestern Univ, Dept Mat Sci & Engn, Evanston, IL 60208 USA
Sandia Natl Labs, Adv Mat Lab, POB 5800, Albuquerque, NM 87185 USAUniv Massachusetts, Dept Polymer Sci & Engn, Amherst, MA 01003 USA
Secor, Ethan B.
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Facchetti, Antonio
Hersam, Mark C.
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Northwestern Univ, Dept Mat Sci & Engn, Evanston, IL 60208 USA
Northwestern Univ, Dept Chem, 2145 Sheridan Rd, Evanston, IL 60208 USAUniv Massachusetts, Dept Polymer Sci & Engn, Amherst, MA 01003 USA
Hersam, Mark C.
Briseno, Alejandro L.
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Univ Massachusetts, Dept Polymer Sci & Engn, Amherst, MA 01003 USA
Penn State Univ, Dept Chem, 520 Chem Bldg, University Pk, PA 16802 USAUniv Massachusetts, Dept Polymer Sci & Engn, Amherst, MA 01003 USA
Briseno, Alejandro L.
Watkins, James J.
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Univ Massachusetts, Dept Polymer Sci & Engn, Amherst, MA 01003 USAUniv Massachusetts, Dept Polymer Sci & Engn, Amherst, MA 01003 USA