The squeeze-film air damping of circular and elliptical micro-torsion mirrors

被引：0
|
作者：
Changfeng Xia
Dayong Qiao
Qi Zeng
Weizheng Yuan
机构：
[1] Northwestern Polytechnical University,Key Laboratory of Micro/Nano Systems for Aerospace, Ministry of Education
[2] Northwestern Polytechnical University,Shaanxi Province Key Laboratory of Micro and Nano Electro
来源：
Microfluidics and Nanofluidics | 2015年 / 19卷
关键词：
Squeeze-film damping; Torsion mirror; Reynolds equation;
D O I：
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中图分类号：
学科分类号：
摘要：
This paper proposes an analytical solution to calculate the squeeze-film air damping of circular and elliptical micro-torsion mirrors. To derive the expressions of squeeze-film air-damping torque, the nonlinear Reynolds equation, which governs the air behavior of torsion mirror, is solved by the method of eigenfunction expansions in polar coordinate and elliptical coordinate, respectively. The series solutions are integrated and summed up to deduce the damping torque of circular and elliptical torsion mirrors. The formulas of circular mirror and elliptical mirror are deduced independently, and their results match when the eccentricity of the elliptical mirror approaches zero. Besides, the results of the formulas are consistent with numerical simulation. Both of them verifies the damping torque formulas in this paper.
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页码：585 / 593
页数：8
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