Direct fabrication of freely movable microplate inside photosensitive glass by femtosecond laser for lab-on-chip application

被引：0
|
作者：
M. Masuda
K. Sugioka
Y. Cheng
T. Hongo
K. Shihoyama
H. Takai
I. Miyamoto
K. Midorikawa
机构：
[1] RIKEN-The Institute of Physical and Chemical Research,Department of Applied Electronics, Faculty of Industrial Science and Technology
[2] Tokyo University of Science,Department of Electrical Engineering
[3] Tokyo Denki University,undefined
[4] HOYA Photonics Corporation,undefined
来源：
Applied Physics A | 2004年 / 78卷
关键词：
Microstructure; Acid Solution; Flow Direction; Femtosecond Laser; Hollow Structure;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
We demonstrate the fabrication of complicated three-dimensional (3D) microstructures embedded in a photosensitive glass by a high-order multiphoton process using a femtosecond (fs) laser. Direct writing of the fs laser followed by a post baking process and preferential etching in a dilute hydrofluoric (HF) acid solution results in a microplate that can freely move in hollow structures embedded in the glass. The fabricated structure functions as a microvalve that can control the flow direction of fluids in the microreactor.
引用
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页码：1029 / 1032
页数：3
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